Brooks, Mf series – Brooks Instrument Mfi Series User Manual

Page 73

5-9

Brooks

Mf Series

Section 5 Parts List

Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009

Table 5-5 Mf Series Tool and Spare Part Kits

Mfi Service Tool Kit

Mfi Series Valve Shim Kit

P/N S778D017AAA

P/N S810A372BMA

Permits the complete disassembly of the

Contains:

Mf Series for servicing

1 - .010" Large Spacer
2 - .005" Large Spacers

Contains:

1 - .010" Small Spacer
2 - .005" Small Spacers

1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool

Model Mf50/60 O-ring Service Kit

2 - Allen Wrench

P/N S375Z278***

1 - Phillips Screw Driver
2 - Hex Wrench

Contains:

1 - Nut Driver for Orifice

1 - Orifice O-ring

1 - Restrictor Removal Tool

1 - Restrictor O-ring

2 - Common Screw Driver

1 - Valve O-ring
2 - Sensor O-rings ( Mfi Series )

A. Mf Series NEMA 4 Gasket Kit

2 - Adaptor O-rings

P/N S375Z383AAA

1 - Syringe with Fomblin Grease
1 - Information Sheet

Contains:

1 - Cover Gasket

Model Mf51/61 O-ring Service Kit

1 - Electronics Housing Gasket

P/N S375Z339***

1 - Valve Nut O-ring
1 - Coil Housing O-ring

Contains:

1 - Coil Base O-ring

1 - Orifice O-ring

4 - Cover Screw O-ring

1 - Restrictor O-ring

2 - Calibration Screws with O-ring

1 - Valve O-ring
2 - Sensor O-rings ( Mfi Series )

Model Mf51 Header Removal Tool

2 - Adaptor O-rings

P/N S817Z036AAA

1 - Endblock O-ring
1 - Syringe with Fumblin Grease

Model Mf51 Orifice Removal Tool

1 - Information Sheet

P/N S908Z049AAA

Model Mf53/63 O-ring Service Kit
P/N S375Z395***

Contains:

1 - Orifice O-ring
1 - Restrictor O-ring
1 - Valve O-ring
2 - Sensor O-rings ( Mfi Series )
2 - Adaptor O-rings
3 - Endblock O-ring
1 - Filter O-rings
2 - Valve Plate O-ring
1 - Seal O-ring
1 - Syringe with Fomblin Grease
1 - Information Sheet

***

QTA = Viton, SUA = Buna, TTA = Kalrez,
NS = Not Shown, AR = As Required

Note: Refer to Brooks publication

DS-TMF-Mfi-Mfx-MFC-eng for additional accessories.