Brooks, Mf series – Brooks Instrument Mfi Series User Manual
Page 18

1-10
Brooks
®
Mf Series
Section 1 Introduction
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure 1-11 Model Mf63 Meter Dimensions
Figure 1-12 Model Mf63 Meter with Flange Dimensions
Connections
"A" Dim.
1/2" Tube Compr.
10.23/260
3/4" Tube Compr.
10.23/260
1" Tube Compr.
10.59/269
1/2" VCO
9.13/232
3/4" VCO
9.84/250
1/2" VCR
9.44/240
0.5", 1", 1.5" NPT
or 1-1/16" - 12
7.55/192
Dimensions in inches/mm
Flange
Class
DIN DN15
PN 40
DIN DN25
PN 40
DIN DN40
PN 40
DIN DN50
PN 40
ANSI 0.5"
150 LBS
ANSI 0.5"
300 LBS
ANSI 1"
150 LBS
ANSI 1"
300 LBS
ANSI 1.5"
150 LBS
ANSI 1.5"
300 LBS
ANSI 2"
150 LBS
ANSI 2"
300 LBS
Dimensions in inches/mm
See also other documents in the category Brooks Instrument Hardware:
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- PTI Metal Seal Mass Flow Controller w/Real-Time Flow Error Detection & Advanced Diagnostics (82 pages)
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- 5800S Series (50 pages)
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- 5851EM (62 pages)
- 5850E (64 pages)
- 5851E (64 pages)
- 5860E (46 pages)
- 5861E (44 pages)
- 5850i (62 pages)
- 5851i (62 pages)
- 5860i (48 pages)
- 5861i (48 pages)
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- GF40 (78 pages)
- SLAMf Series (76 pages)
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- CMC Series (36 pages)
- XacTorr CMX45 (64 pages)
- MT3809G (78 pages)
- MT3809E (72 pages)
- MT3810 (66 pages)
- 3600 Series (56 pages)
- 3750 (64 pages)
- Control Valve (16 pages)
- GT1000 (52 pages)
- 1100 Series (52 pages)
- 1307 (18 pages)
- 1358 (44 pages)
- 1350 (46 pages)
- 1250 (2 pages)
- FC8800 Series (48 pages)