Warning, Brooks, Mf series – Brooks Instrument Mfi Series User Manual
Page 39
4-1
Brooks
®
Mf Series
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
4-1 General
It becomes necessary to remove the instrument from the system
after exposure to toxic, pyrophoric, flammable or corrosive gas,
purge the controller thoroughly with a dry inert gas such as
nitrogen before disconnecting the gas connections. Failure to
correctly purge the controller could result in fire, explosion or
death. Corrosion or contamination of the mass flow controller
upon exposure to air may also occur.
WARNING
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