Brooks Instrument Mfi Series - Manual (Page 62)

4-24
Brooks ® Mf Series
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure 4-4 Model Mf51/61 Restrictor Element Assembly
5. Install the inlet adapter fitting and O-ring.
6. Recalibration of the controller or meter should be considered in order to
maintain correct accuracy.
Table 4-7 Model Mf51/61 Restrictor Selection Guide
Full Scale Range Restrictor
slpm Nitrogen Element
Equivalent Flow* Combination Part Number
4.6 to 15 1-40 micron (1 inch) S613E604BMT
15 to 26 1-40 micron S613E636BMT
26 to 42 2-40 micron S613E523BMT
42 to 60 3-40 micron S613E526BMT
60 to 79 2-40 micron/1-60 micron S613E528BMT
79 to 93 1-40 micron/2-60 micron S613E529BMT
93 to 130** 3-60 micron S613E527BMT
*Based on 0°C Standard Reference Temperature
**For Hydrogen from 130 slpm to 200 slpm use 3-60 micron restrictor elements.
Note: If the nitrogen equivalent flow is between two sizes, select the larger size.