Brooks, Mf series, Tb-1 – Brooks Instrument Mfi Series User Manual
Page 14: Tb-3 tb-2
1-6
Brooks
®
Mf Series
Section 1 Introduction
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure 1-4 Mf Series Typical Hookup to Brooks 0151i Power Supply
Figure 1-3 Terminal Strip Labeling
TB-1
ICMD
NC
GND
VCMD CMDCOM
NC
VOR VREF
VSUP+SUPCOM
NC
SIGCOM
VSIG
TB-3
TB-2
ISIG
NC
VALVE
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