Brooks Instrument Mfi Series - Manual (Page 17)

1-9
Section 1 Introduction
Brooks ® Mf Series
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure 1-9 Model Mf60 Meter Dimensions
Figure 1-10 Model Mf 61 Meter Dimensions
Connections "A" Dim.
9/16 -18 UNF 3.89/98.7
1/4" Tube Compr. 5.93/150.7
1/8" Tube Compr. 5.74/145.7
1/4" VCR 5.78/146.7
1/4" VCO 5.46/138.7
1/4" NPT 5.50/139.7
6 mm Tube Compr. 5.93/150.7
Dimensions in inches/mm
Connections "A" Dim.
9/16 -18 UNF 4.45/113.1
1/4" Tube Compr. 6.48/164.5
3/8" Tube Compr. 6.60/167.6
1/4" VCR 6.34/161
1/4" VCO 6.02/152.8
Dimensions in inches/mm