Brooks Instrument Mfi Series - Manual (Page 11)

1-3
Section 1 Introduction
Brooks ® Mf Series
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Repeatability
0.25% of rate
Sensitivity to Mounting Attitude
±0.5% full scale maximum deviation from specified accuracy after
re-zeroing under 200 psig. Specify mounting attitude at time of order to
insure optimum performance.
Temperature Sensitivity
Zero: Less than ±0.075% F.S. per degree C
Span: Less than ±1.0% F.S. shift from original calibration over 50°F to
122°F range (10°C to 50°C)
Pressure Sensitivity
±0.03% per psi up to 200 psig (N
2
)
Ratings:
Operating Pressure
Refer to Table 1-1
Differential Pressure (Controllers)
Mf50: 5 to 50 psid pressure drop
Mf51: 10 to 50 psid pressure drop
Mf53: Standard high differential valve > 30 to 290 psid
Optional: Low differential valve 7.5 to 30 psid (<500 slpm)
11.8 to 30 psid (>500 slpm)
Response Time
Less than 6 seconds to within 2% of full scale of final value for a 0 to 100%
command change. Refer to Figure 1-2, typical performance curve.
Temperature Ambient/Gas
41°F to 149°F (5°C to 65°C)
Leak Integrity, Outboard
1 x 10 -9 atm cc/sec. He (excluding permeation)
PHYSICAL:
Materials of Construction
Standard wetted parts: Stainless steel with Viton ® fluoroelastomers or Buna-N
Optional: Kalrez ®
Dimensions
Controllers: Refer to Figures 1-6 through 1-9
Meters: Refer to Figures 1-10 through 1-12
Process Connections
Refer to the table at the bottom of each dimensional drawing for process
connection sizes and options specific to each size controller and meter.