Brooks Instrument Mfi Series - Manual (Page 15)

1-7
Section 1 Introduction
Brooks ® Mf Series
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure 1-5 Model Mf50 Controller Dimensions
Figure 1-6 Model Mf51 Controller Dimensions
Connections "A" Dim.
9/16 -18 UNF 5.28/134
1/4" Tube Compr. 7.30/185
1/8" Tube Compr. 7.13/181
1/4" VCR TM 7.17/182
1/4" VCO TM 6.85/174
1/4" NPT 6.89/175
6mm Tube Compr. 7.32/186
Dimensions in inches/mm
Connections "A" Dim.
9/16 -18 UNF 5.85/148.5
1/4" Tube Compr. 7.87/199.9
3/8" Tube Compr. 7.99/203.0
1/4" VCR 7.74/196.5
1/4" VCO 7.42/188.5
Dimensions in inches/mm