Brooks Instrument Mfi Series - Manual (Page 6)

ii
Brooks ® Mf Series
Contents Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure Page
Number Number
1-1 Principle of Operation ................................................................................................................. 1-2
1-2 Maximum Allowable Output Loop Resistance ............................................................................ 1-5
1-3 Terminal Strip Labeling ............................................................................................................... 1-6
1-4 Mf Series Typical Hookup to Brooks 0151i Power Supply .......................................................... 1-6
1-5 Model Mf50 Controller Dimensions ............................................................................................ 1-7
1-6 Model Mf51 Controller Dimensions ............................................................................................ 1-7
1-7 Model Mf53 Controller Dimensions ............................................................................................ 1-8
1-8 Model Mf53 Controller with Flange Dimensions ......................................................................... 1-8
1-9 Model Mf60 Meter Dimensions .................................................................................................. 1-9
1-10 Model Mf61 Meter Dimensions .................................................................................................. 1-9
1-11 Model Mf63 Meter Dimensions ................................................................................................. 1-10
1-12 Model Mf63 Meter with Flange Dimensions .............................................................................. 1-10
2-1 Common Electrical Hookups ...................................................................................................... 2-6
2-2 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) ...... 2-7
2-3 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply) ............. 2-7
3-1 Flow Sensor Operational Diagram ............................................................................................. 3-2
3-2 Flow Control System Block Diagram .......................................................................................... 3-3
3-3 Mf Series Calibration Connections ............................................................................................. 3-5
3-4 Adjustment Potentiometer Location ........................................................................................... 3-5
3-5 PC Board Jumper Location & Function ...................................................................................... 3-6
3-6 Fast Response Adjustment ........................................................................................................ 3-8
4-1 Torque Sequence for the Valve Retainer Plate (Controller) ........................................................ 4-5
4-2 Voltmeter Connections for Valve Adjustment ............................................................................. 4-9
4-3a Valve Adjusting Spacer Locations (Normally Closed Valve) ..................................................... 4-12
4-3b Valve Adjusting Spacer Locations (Normally Open Valve) ........................................................ 4-13
4-4 Model Mf51/61 Restrictor Element Assembly ............................................................................ 4-24
4-5 Model Mf51/61 Restrictor Element Orientation in Controller/Meter Body .................................. 4-25
5-1 Model Mf50/60Parts Drawing ..................................................................................................... 5-2
5-2 Model Mf51/61 Parts Drawing .................................................................................................... 5-3
5-3 Model Mf53/63 Parts Drawing .................................................................................................... 5-4