Brooks Instrument Mfi Series - Manual (Page 16)

1-8
Brooks ® Mf Series
Section 1 Introduction Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure 1-7 Model Mf53 Controller Dimensions
Figure 1-8 Model Mf53 Controller with Flange Dimensions
Connections "A" Dim.
1/2" Tube Compr. 11.96/303.8
3/4" Tube Compr. 11.96/303.8
1" Tube Compr. 12.31/312.8
1/2" VCO 10.86/275.8
3/4" VCO 11.57/293.8
1/2" VCR 11.17/283.8
0.5", 0.1", 1.5" NPT or
1-1/16"-12 9.28/235.8
Dimensions in inches/mm
Flange Class
DIN DN14 PN 40
DIN DN25 PN 40
DIN DN40 PN 40
DIN DN50 PN 40
ANSI 0.5" 150 LBS
ANSI 0.5" 300 LBS
ANSI 1" 150 LBS
ANSI 1" 300 LBS
ANSI 1.5" 150 LBS
ANSI 1.5" 300 LBS
ANSI 2" 150 LBS
ANSI 2" 300 LBS
Dimensions in inches/mm