Brooks Instrument Mfi Series - Manual (Page 47)

4-9
Brooks ® Mf Series
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Figure 4-2 Voltmeter Connections for Valve Adjustment
17.For Mf51/61, remove the four screws from the end block and carefully
remove the end block.
B. Assembly (Mfx Series sensor assembly is not removable)
Note: It is recommended that all service O-rings be replaced during
instrument assembly. All service O-rings should be lightly lubricated with
Fomblin lubricant (part of service O-ring kit, Section 5) prior to their
installation.
Note: Torque valves for all critical fasteners are listed in Table 4-3.
1. Examine all parts for signs of wear or damage, replace as necessary.
2. Place the restrictor O-ring on the restrictor assembly. Screw the
restrictor assembly into the inlet side of the flow controller body using
the restrictor tool, tighten hand tight.