Brooks Instrument Mfi Series - Manual (Page 5)

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Brooks ® Mf Series
Contents Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
Paragraph Page
Number Number
Section 1 Introduction
1-1 Description ................................................................................................................................. 1-1
1-2 Design Features ......................................................................................................................... 1-1
1-3 Principle of Operation ................................................................................................................. 1-1
1-4 Specifications ............................................................................................................................. 1-2
1-5 Electrical Specifications .............................................................................................................. 1-4
Section 2 Installation
2-1 General ...................................................................................................................................... 2-1
2-2 Receipt of Equipment ................................................................................................................. 2-1
2-3 Recommended Storage Practice ............................................................................................... 2-1
2-4 Return Shipment ........................................................................................................................ 2-2
2-5 Transit Precaution ...................................................................................................................... 2-2
2-6 Removal from Storage ............................................................................................................... 2-2
2-7 Gas Connections ........................................................................................................................ 2-3
2-8 In-Line Filter ............................................................................................................................... 2-3
2-9 Installation (Refer to Table 4-1, Figure 1-4 and Quick Start Instructions) ................................... 2-3
2-10 Electrical Interfacing (Electrical Specifications Refer to Section 1-5) ......................................... 2-8
2-11 Configuring the PC Board .......................................................................................................... 2-9
Section 3 Operation
3-1 Theory of Operation ................................................................................................................... 3-1
3-2 Operating Procedure .................................................................................................................. 3-2
3-3 Zero Adjustment ......................................................................................................................... 3-3
3-4 Calibration Procedure ................................................................................................................ 3-4
3-5 Response ................................................................................................................................... 3-8
Section 4 Maintenance & Troubleshooting
4-1 General ...................................................................................................................................... 4-1
4-2 Troubleshooting .......................................................................................................................... 4-2
4-3 Sensor Tube ............................................................................................................................... 4-7
4-4 Disassembly and Assembly ....................................................................................................... 4-7
4-5 Gas Conversion Factors ........................................................................................................... 4-18
4-6 Restrictor Sizing ........................................................................................................................ 4-22
4-7 Orifice Sizing ............................................................................................................................. 4-25
Section 5 Parts List
5-1 General ...................................................................................................................................... 5-1
Section A CE Certificate
CE Certificate of Mass Flow Equipment ................................................................................................ A-1
Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover
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