Brooks Instrument Mfi Series - Manual (Page 42)

4-4
Brooks ® Mf Series
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-Mfi-Mfx-MFC-eng
Part Number: 541B074AAG
August, 2009
When used with a reactive (sometimes toxic) gas, contamination
or corrosion may occur as a result of plumbing leaks or improper
purging. Plumbing should be checked carefully for leaks and the
controller purged with dry Nitrogen before use.
CAUTION
B. Bench Troubleshooting
1. Properly connect the mass flow instrument to a correct Vdc power
supply, refer to Table 1-3, power requirements and setpoint source
(controller). Connect an output signal readout device (4-1/2 digit
voltmeter recommended) to TB-1, Terminals 5 and 4 (refer to Figure
1-4 and Table 1-4). Apply power, set the setpoint to zero (controller).
Allow the instrument to warm-up for 45 minutes. Do not connect to a
gas source at this time.
Observe the output signal and, if necessary, perform the zero
adjustment procedure (Section 3-3). If the output signal will not zero
properly, refer to the sensor troubleshooting section and check the
sensor. If the sensor is electrically functional, the printed circuit board is
defective and will require replacement.
Table 4-2 Sensor Troubleshooting