Brooks Instrument 5800S Series - Manual (Page 6)

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
6
Smart Service
If you are equipped with primary standard Volumeter calibration equipment or
(secondary standard) Brooks Smart Mass Flow Meters, you can use the
model 0163 Brooks Smart Service program for (re)configuration, diagnostics,
calibration and/or verification.The HART protocol-based commands are listed in
a separate.
Communication manual
Document: Brooks part number: 541-C-053-AAA.
1.3 Description
Models 5860S, 5861S, 5863S and 5864S Brooks Smart Mass Flow Meters are
primarily used to provide accurate measurements of gas flows. The heart of
these systems is the thermal mass flow sensor, which produces an electrical
output signal as a function of flow rate.
In addition, models 5850S, 5851S and 5853S Brooks Smart Mass Flow
Controllers control gas flows. The flow ranges per model are listed in Table 1-1.
Table 1-1: Flow ranges per model
min. f.s. max. f.s. Unit *
5850 S 5860 S 0.003 30 ln/min.
5851 S 5861 S 20 100 ln/min.
5853 S 5863 S 100 2500 ln/min.
Mass Flow
Meter
Model
Mass Flow
Controller
Model
Flow Ranges
*refers to ‘normal’ conditions, i.e. 0°C, 1013.25mbar.
The Brooks Smart Mass Flow Meter is a stand-alone instrument with
microprocessor-based electronics on board. The MF-series Smart Mass Flow
Controller has an integrally-mounted control-valve module with which stable gas
flows can be achieved.
The standard features listed below apply to all models.
The supplied inlet adapter has a built-in, upstream inlet filter for flow
straightening. Besides reducing the effects of changes in upstream piping, this
also protects the measuring element from occasional debris in the flow stream.
In addition, it eliminates the need for extra (expensive) nlet filtering.
•
Flow signal adjustable via software:
0-5 Vdc or 1-5 Vdc or
0-20 mA or 4-20 mA.
Note: Digital output (communication) is simultaneously available with analogue
output.
Section 1: Introduction