Brooks Instrument 5800S Series - Manual (Page 23)

Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
23
4.3 Cleaning Procedures
When deposition makes it necessary to clean the Smart Mass Flow Controller
or Mass Flow Meter, use the following procedures:
1. Remove the unit from the system.
2. Purge with dry nitrogen gas, which removes virtually all particulate matter
from the device. Should contamination persist, subject all wetted 1
components to ultrasonic cleaning. Following this, purge the device
thoroughly with dry nitrogen once again.
3. If the sensor is contaminated, remove the sensor and use a haemostat or
tweezers to push a 0.007”-diameter piano wire through the flow-sensor tube
to remove any contamination (end closest to the control valve). The sensor
tube can then be flushed with a solvent that leaves no residue. This can be
accomplished conveniently using a hypodermic needle filled with solvent.
NOTE: Do not soak the sensor assembly in a cleaning solution. If solvent seeps
into the sensor assembly, it will probably damage the sensor, or at least
significantly alter its operating characteristics.
4.4 Calibration Procedure
The calibration of Smart Mass Flow devices is not described in this manual.
Such calibration requires the use of accurate and traceable calibration
equipment such as Brooks Volumeter equipment, in addition to digital
communications.
However, if the above equipment is available at your facility, then Brooks
Instrument will supply you with copy of the calibration procedure document
(no.:834-P-064) upon request.
4.5 Valve (Dis)Assembly Procedure
NOTE: If (dis)assembly is required, but the necessary expertise or equipment is
not available, then the instrument should be returned to the factory.
However, if the requisite equipment is available at your facility, Brooks
Instrument will supply you with copy of the dis (assembly) procedure document
(no.: 834-L-030) upon request.
The model 5853S control valve assembly consists of an axially mounted main
valve driven by the top-mounted pilot valve. The main valve should not be
disassembled. If necessary, please return the Mass Flow Controller to the
factory.
1 Wetted components include the body, laminar-flow element, and all valve components including the orifice,
process adapters and inlet filter.
Section 4: Maintenance