Brooks Instrument 5800S Series - Manual (Page 4)

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
4
Table of Contents
Section 1:Introduction ......................................................................................................................................... 5
1.1 Purpose ........................................................................................................................................... 5
1.2 How to use this Manual .................................................................................................................... 5
1.3 Description ....................................................................................................................................... 6
Section 2: Installation ......................................................................................................................................... 9
2.1 General ............................................................................................................................................ 9
2.2 Receipt of Equipment ....................................................................................................................... 9
2.3 Recommended Storage Practice ..................................................................................................... 10
2.4 Return Shipment ............................................................................................................................. 10
2.5 Gas Connections ............................................................................................................................ 10
2.6 Mechanical Installation .................................................................................................................... 11
2.7 IN-LINE Filter .................................................................................................................................. 11
2.8 Electrical Interfacing ........................................................................................................................ 12
2.9 Digital Communication .................................................................................................................... 14
2.10 Interconnection .............................................................................................................................. 16
Section 3: Operation .......................................................................................................................................... 19
3.1 Operating Procedure ....................................................................................................................... 19
3.2 Zero Adjustment .............................................................................................................................. 19
3.3 Calibration Procedure ...................................................................................................................... 19
Section 4: Maintenance ..................................................................................................................................... 20
4.1 General ........................................................................................................................................... 20
4.2 Troubleshooting and System checks ............................................................................................... 20
4.3 Cleaning Procedures ....................................................................................................................... 23
4.4 Calibration Procedure ...................................................................................................................... 23
4.5 Valve (Dis)Assembly Procedure ..................................................................................................... 23
Section 5: Specification ........................................................................................................................................ 24
Appendix A: Gas Conversion Tables ..................................................................................................................... 28
Appendix B: Dimensional drawings ...................................................................................................................... 32
Appendix C:Translation of CE Marking electrical installation instructions .............................................................. 34
Appendix D: Important Safety Instructions ............................................................................................................ 39
Appendix E: Modellist ......................................................................................................................................... 44
Figures
Figure 2-1: Open Collector ................................................................................................................................... 13
Figure 2-2: p.c. boards with the locations of jumper switches Note: Switch number 1 is the switch at the bottom 14
Figure 2-3: RS-232 interconnection of TMF and PC .............................................................................................. 16
Figure 2-4: RS-485 multidrop interconnection TMFs and PC ................................................................................. 16
Figure 2-5: TMF/C to Read-out cable ................................................................................................................... 17
Figure 2-6: TMF/C Read-out and pc ..................................................................................................................... 17
Tables
Table 1-1: Flow ranges per model .......................................................................................................................... 6
Table 2-1: Electrical interfacing. Smart TMF ........................................................................................................ 12
Table 2-2: Dipswitch settings ............................................................................................................................... 15
Table 2-3: Electrical interfacing. Smart TMF cable ............................................................................................... 18
Table 4-1: Troubleshooting ................................................................................................................................... 22
Table 5-1: Flow ranges and pressure ratings ........................................................................................................ 25