Brooks Instrument 5800S Series - Manual (Page 20)

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
20
Section 4: Maintenance
4.1 General
No routine maintenance is required on the Smart Mass Flow Meters and
Controllers other than occasional cleaning. The in-line filter should periodically
be replaced or ultrasonically cleaned.
NOTE: If recalibration is required, but the necessary expertise or equipment is
not available, the instrument should be returned to the factory.
4.2 Troubleshooting and System checks
The Smart Mass Flow Meters and Controllers are generally used as a
component in gas handling systems, which can be complex in nature. It can
therefore be very difficult to isolate a malfunction in the system. An incorrectly
diagnosed malfunction can cause many hours of unnecessary downtime. If
possible, perform the following system checks before removing a suspect Mass
Flow Meter or controller for bench troubleshooting or return to the factory
(especially if the system is new):
1. Verify a low resistance common connection and that the correct power
supply voltage and signals are present of the connector of the Smart TMF.
2. Verify that the process gas connections have been made correctly, and that
they have been tested for leaks.
3. If the mass flow controller appears to be functioning but cannot achieve Set
point, verify that there is sufficient inlet pressure and pressure drop at the
controller to provide the required flow.
4. Verify that all user-selectable jumpers and switches have been set to the
appropriate positions. Refer to Figure 2-2 and table 2-2 .
NOTE: If it becomes necessary to remove the instrument from the system after
exposure to toxic, pyrophoric, flammable or corrosive gas, purge the instrument
thoroughly with a dry inert gas such as nitrogen before disconnecting the gas
connections. Failure to correctly purge the instrument could result in fire,
explosion or death. The MF-series Smart Mass Flow device may also become
corroded or contaminated upon exposure to air.
Bench Troubleshooting
1. Establish a proper connection between the Smart Mass Flow Meter or
Controller and a +15 Vdc to +28 Vdc power supply (and, if necessary, to a
-15 Vdc power supply) and connect an output signal read-out device (4½
digit voltmeter recommended) to pins 2 and 10 on the 15-pin Sub-D
connector. Switch on the power and allow the instrument to warm-up for 45
minutes. In case of a Controller model, adjust the Set point to zero. Do not
connect the device to a gas source yet. Observe the output signal and, if