Appendix e: modellist 44, Appendix e: modellist, Models 5800-s – Brooks Instrument 5800S Series User Manual
Page 44: Installation and operation manual
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
44
Appendix E: Modellist
BROOKS SMART MASS FLOW PRODUCTS
SMART MASS FLOW METERS / CONTROLLERS
BASE M ODEL NUM BER
DESCRIPTION
5860S/BA
MA SS FLOW METER; F.S. FLOWRA NGES: 0.003 - 0.008 ln/min.
5860S/BC
MA SS FLOW METER; F.S. FLOWRA NGES: 0.008 - 30 ln/min.
5861S/BD
MA SS FLOW METER; F.S. FLOWRA NGES: 20 - 100 ln/min.
5863S/BE
MA SS FLOW METER; F.S. FLOWRA NGES: 100 - 200 ln/min.
5863S/BF
MA SS FLOW METER; F.S. FLOWRA NGES: 200 - 300 ln/min.
5863S/BG
MA SS FLOW METER; F.S. FLOWRA NGES: 300 - 400 ln/min.
5863S/BH
MA SS FLOW METER; F.S. FLOWRA NGES: 400 - 500 ln/min.
5863S/BJ
MA SS FLOW METER; F.S. FLOWRA NGES: 500 - 600 ln/min.
5863S/BK
MA SS FLOW METER; F.S. FLOWRA NGES: 600 - 700 ln/min.
5863S/BL
MA SS FLOW METER; F.S. FLOWRA NGES: 700 - 800 ln/min.
5863S/BM
MA SS FLOW METER; F.S. FLOWRA NGES: 800 - 900 ln/min.
5863S/BN
MA SS FLOW METER; F.S. FLOWRA NGES: 900 - 1000 ln/min.
5863S/B1
MA SS FLOW METER; F.S. FLOWRA NGES: 1001 - 1100 ln/min.
5863S/B2
MA SS FLOW METER; F.S. FLOWRA NGES: 1101 - 1300 ln/min.
5863S/B3
MA SS FLOW METER; F.S. FLOWRA NGES: 1301 - 1600 ln/min.
5863S/B4
MA SS FLOW METER; F.S. FLOWRA NGES: 1601 - 1900 ln/min.
5863S/B5
MA SS FLOW METER; F.S. FLOWRA NGES: 1 901 - 2200 ln/min.
5863S/B6
MA SS FLOW METER; F.S. FLOWRA NGES: 2201 - 2500 ln/min.
5850S/BA
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 0.003 - 0.008 ln/min.
5850S/BC
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 0.008 - 30 ln/min.
5851S/BD
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 20 - 100 ln/min.
5853S/BE
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 100 - 200 ln/min.
5853S/BF
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 200 - 300 ln/min.
5853S/BG
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 300 - 400 ln/min.
5853S/BH
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 400 - 500 ln/min.
5853S/BJ
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 500 - 600 ln/min.
5853S/BK
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 600 - 700 ln/min.
5853S/BL
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 700 - 800 ln/min.
5853S/BM
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 800 - 900 ln/min.
5853S/BN
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 900 - 1000 ln/min.
5853S/B1
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 1001 - 1100 ln/min.
5853S/B2
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 1101 - 1300 ln/min.
5853S/B3
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 1301 - 1600 ln/min.
5853S/B4
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 1601 - 1900 ln/min.
5853S/B5
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 1 901 - 2200 ln/min.
5853S/B6
MA SS FLOW CONTROLLER; F.S. FLOWRA NGES: 2201 - 2500 ln/min.