Brooks Instrument 5800S Series - Manual (Page 24)

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
24
Section 5: Specification
PERFORMANCE SPECIFICATIONS
Flow ± 0.7% of rate and ±0.2% F.S. (at calibration conditions)
Accuracy ± 0.5% of rate and ±0.1% F.S. (optional consult factory)
± 1.0% F.S. for flowrates above 1100 l
n
/min (for 5863/5853)
Repeatability ± 0.25% of rate
Rangeability 50:1 (within specified accuracy)
Controllability 100:1 (i.e. total operating range)
Stability Less than ± 0.5% of rate per year
Temperature - Zero: Less than 0.075% F.S. per degree C
Sensitivity For flowrates over 100 l/min gas and ambient temperature must
be equal
PHYSICAL SPECIFICATIONS
Materials of Wetted parts stainless steel with Viton®, Buna-N®,
Construction PTFE/Kalrez® or EPDM seals
Mechanical NPT(F), Tube compression, VCR / VCO Downport Option:
connections Flanged DIN- or ANSI type available
Electrical 15-pin, D-type connector (goldplated contacts)
connections
SPECIFICATIONS
Certification
•••••
CE certified
•••••
EMC Directive (89/336/EEC)
EN 61326-1: 1997 + A1: 1998
•••••
Pressure Equipment Directive (97/23/EC)
•••••
II 3 G EEx nA II T4, per EN 60079-15:2003
•••••
KEMA 03ATEX1433 X
The modules shall be installed in a suitable enclosure providing
a degree of protection of at least IP54 according to EN 60529,
taking into account the environmental conditions under which
the equipement will be used”.
Setpoint Input* Voltage: 0 - 5 Vdc or 1 - 5 Vdc input
impedance > 2000 Ohm
Current: 0 - 20 mA or 4-20 mA
Communication: 250 Ohm impedance.
Analogue Voltage: 0 - 5 Vdc or 1 - 5 Vdc > 2000 Ohm
output* Current: 0 - 20 mA or 4-20 mA
max. loop resistance 375 Ohm