Brooks Instrument 5800S Series - Manual (Page 19)

Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
19
Section 3: Operation
3.1 Operating Procedure
1 Apply power to the Smart Mass Flow device and allow approximately 45
minutes for the instrument to reach a stable temperature.
2 Check the flow reading before turning on the pressurised gas supply. If the
flow reading is >0.2% then the instrument should be re-zeroed
(see section 3.2).
3 Turn on the gas supply.
4 Regulate flow to 0%. Monitor the instrument’s output signal. If the output is
not <0.2%, check for leaks.
5 Commence normal operation.
3.2 Zero Adjustment
Each Smart Mass Flow device is factory-adjusted to provide a 0 ±10 mVdc
signal at zero flow. The adjustment is carried out in our calibration laboratory, an
ambient the temperature of 20°C is maintained. After initial installation and
warm-up in the gas system, the zero flow indication may differ from the factory
setting. This is primarily caused by differences in temperature between our
calibration laboratory and the final mounting position.
When checking the zero flow indication, always mount the device in its final
location and allow a minimum of 45 minutes for it to reach a stable temperature.
In case Zero adjustment is required, this can be done via Smart Control (model
0160) or via the zero push button next to the diagnostics LED.
The zero adjustment should be carried out under process conditions and no flow.
3.3 Calibration Procedure
Calibration of the Smart Mass Flow device is not described in this manual.
Calibration can only be achieved with use of the accurate Brooks Vol-U-Meter
equipment and the digital communication.