Models 5800-s, Installation and operation manual, Appendix a – Brooks Instrument 5800S Series User Manual
Page 30
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
30
Dimethylamine
(CH3)2NH
0,37
1,269
2,013
Dimethylether
(CH3)2O
0,392
1,281
2,055
2,2-Dimethylpropane
C(CH3)4
0,247
1,613
3,244
Disilane
Si2H6
0,332
1,493
2,779
Ethane
C2H6
0,49
1,038
1,357
Ethanol
C2H6O
0,394
1,282
2,057
Ethylacetylene
C4H6
0,365
1,384
2,388
Ethyl Chloride
C2H5CL
0,408
1,516
2,879
Ethylene
C2H4
0,619
1
1,261
Ethylene Oxide
C2H4O
0,589
1,254
1,965
Fluorine
F2
0,924
1,163
1,695
Fluoroform (f-23)
CHF3
0,529
1,584
3,127
Germane
GeH4
0,649
1,653
3,418
Germanium Tetrachloride
GeCL4
0,268
2,766
9,574
Halothane
C2HBrCLF3
0,257
2,654
8,814
Helium
He
1,386
0,378
0,178
Hexafluoroacetone
C3F6O
0,219
2,434
7,414
Hexafluorobenzine
C6F6
0,632
2,577
8,309
Hexafluoroethane (f-116)
C2F6
0,255
2,219
6,139
Hexafluoropropylene (HFP)
C3F6
0,249
2,312
6,663
Hexamethyldisilane (HMDS)
(CH2)6Si2
0,139
2,404
7,208
Hexane
C6H14
0,204
1,757
3,847
Hydrogen
H2
1,008
0,269
0,09
Hydrogen Bromide
HBr
0,987
1,695
3,645
Hydrogen Chloride
HCL
0,983
1,141
1,639
Hydrogen Cyanide
HCN
0,744
0,973
1,179
Hydrogen Fluoride
HF
0,998
0,845
0,893
Hydrogen Iodide
HI
0,953
2,144
5,789
Hydrogen Selenide
H2Se
0,837
1,695
3,613
Hydrogen Sulfide
H2S
0,85
1,108
1,539
Iodine Pentafluoride
IF5
0,283
2,819
9,907
Isobutane
C4H10
0,26
1,44
2,596
Isobutene
C4H8
0,289
1,435
2,503
Isopentane
C5H12
0,211
1,605
3,222
Krypton
Kr
1,382
1,729
3,708
Methane
CH4
0,763
0,763
0,717
Methylacetylene
C3H4
0,473
1,196
1,782
Methyl Bromide
CH3Br
0,646
1,834
4,236
3-Methyl-1-butene
C5H10
0,252
1,584
3,127
Methyl Chloride
CH3CL
0,687
1,347
2,308
Methyl Fluoride
CH3F
0,761
1,102
1,518
Methyl Mercaptan
CH4S
0,588
1,313
2,146
Methyl Silane
CH6Si
0,393
1,283
2,061
Methyl Trichlorosilane
CH3CL3Si
0,267
2,31
6,675
Methyl Vinyl Ether
C3H6O
0,377
1,435
2,567
Monoethyanolamine
C2H7NO
0,305
1,477
2,728
Monoethylamine (CH3CH2NH2)
C2H7
0,359
1,269
2,013
Monomethylamine
CH3NH2
0,565
1,067
1,42
Neon
Ne
1,398
0,847
0,902
Nickel Carbonyl
Ni(CO)4
0,212
2,371
7,008
Nitric Oxide
NO
0,995
1,03
1,339
Nitrogen
N2
1
1
1,251
Gas Conversion Table (continued)
Appendix A