Brooks Instrument 5800S Series - Manual (Page 11)

Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
11
2.6 Mechanical Installation
(For dimensional drawings see Appendix B: Dimensional drawings)
NOTE: When installing the Mass Flow device, care should be taken to prevent
foreign materials from entering the instrument’s inlet or outlet. Do not remove the
protective end-caps until the actual moment of installation.
When used with reactive gases (some of which may be toxic), contamination or
corrosion may occur as a result of plumbing leaks or improper purging.
Plumbing should be checked carefully for leaks and the Mass Flow device
should be purged (for a significant time) with Nitrogen before and after use on
reactive gasses.
Recommended installation procedures:
a. All models should be mounted in places that are relatively free from
mechanical shocks and vibration.
b. Leave sufficient room for access to the electrical components.
c. Install in a manner that allows the instrument to be easily removed for
cleaning.
d. The mounting position of the Smart Mass Flow Meter or Controller can be
either horizontal or vertical, in case process pressures are smaller than 10
bar.
e. For higher process pressures, a horizontal installation is preferred, since
these pressures may cause a thermal siphon effect of the output signal at
zero flow conditions and degrading specifications.
NOTE: The control valve of the Smart Mass Flow Controller provides precision
control and is not designed for positive shut off. If positive shut off is required, it
is recommended that a separate shut-off valve be installed in-line, downstream
from the Smart Mass Flow Controller.
NOTE: If the power supply to the Smart Mass Flow Controller is interrupted, a
NORMALLY CLOSED valve will be fully closed, while a NORMALLY OPEN valve
will be fully open. The NORMALLY OPEN control valve meets application
specific requirements, since it allows nitrogen gas purging if the power supply is
interrupted.
2.7 In-Line Filter
An in-line filter is installed, as standard, in the instrument’s inlet to prevent any
foreign material entering the flow sensor or control valve. The filtering element
should be periodically replaced or ultrasonically cleaned.
Apply only clean gasses on Mass Flow Meter/Controllers.
Section 2: Installation