Brooks Instrument 5800S Series - Manual (Page 25)

Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
25
Table 5-1: Flow ranges and pressure ratings
Mass Flow
Controller Mass Flow
Meter Pressure P.E.D. Module H
Category
Model: Model: Min. f.s. Max. f.s. Unit 1 Bar
5850 S 5860 S 0.003 30 l
n
/min. 100/300 bar S.E.P.
5851 S 5861 S 2 20 100 l
n
/min. 100 bar S.E.P.
5853 S 3 5863 S 100 2500 l
n
/min. 70 bar 1 for all 150 lbs flanges
2 for all other connections
Brooks Smart Mass Flow Products
Flow Ranges N2
Equivalent Ratings
1. referring to normal conditions, i.e. 0°C, 1013.25 mbar.
2. 300 bar version optional
3. max. Delta P for 5853 S is 20 bar
Digital RS-232- or RS-485*
Communication* Baud rate 1200, 2400, 3600, 4800, 7200, 9600, 19K2,
38K4*
PROFIBUS-DP up to 12 Mbit/sec. (self selecting)
Alarm (TTL) Open Collector Output signal earthed when activated.
Max. 30 Vdc, 25 mA. Or via communication port, when used
digitally.
5 Vdc. ref. 5 Vdc. reference voltage load impedance > 2000 Ohm.
Security If self-diagnostics detects a failure, the alarm mode will be
activated (Open Collector Output via the connector). Details
of the cause of the failure are available through
digital communication.To prevent "unauthorized" setting or
reranging of span or zero, these functions are only
accessible via the Brooks Smart Control, model 0160, or
using Smart DDE, model 0162.
Power +15Vdc to +28Vdc or +/-15Vdc. (use only 24 Vdc for NO
requirements valves and for use of 5851 S).
Power Consumption
Mass Flow
Models 5860 S, 5861 S, 5863 S and 5864 S:
Meters for + 24 Vdc (± 10%) at 80 mA (120 mA for Profibus)
for + 15 Vdc (± 5%) at 90 mA
Power Consumption
Mass Flow
Models 5850 S, 5851 S and 5853 S
Controllers for + 24 Vdc (± 10%) at 140 mA (180 mA for Profibus)
for + 15 Vdc (± 10%) at 185 mA
NOTE: With valve override function activated: the total power
consumption specifications are:
for + 15 Vdc at 285 mA or
for + 24 Vdc at 370 mA
Section 5: Specification