Models 5800-s, Installation and operation manual, Appendix a – Brooks Instrument 5800S Series User Manual
Page 29
Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
29
Gasname
Formula
Gasfactor
Orifice factor Density (kg/m3)
Acetylene (Ethyne)
C2H2
0,615
0,97
1,173
Air
Mixture
0,998
1,018
1,293
Allene
C3H4
0,478
1,199
1,787
Ammonia
NH3
0,786
0,781
0,771
Argon
Ar
1,395
1,195
1,784
Arsine
AsH3
0,754
1,661
3,478
Boron Trichloride
BCL3
0,443
2,044
5,227
Boron Trifluoride
BF3
0,579
1,569
3,025
Bromine Pentafluoride
BrF5
0,287
2,502
7,806
Bromine Trifluoride
BrF3
0,439
2,214
6,108
Bromotrifluoroethylene
C2BrF3
0,326
2,397
7,165
Bromotrifluoromethane (f-13B1)
CBrF3
0,412
2,303
6,615
1,3-Butadiene
C4H6
0,354
1,413
2,491
Butane
C4H10
0,257
1,467
2,593
1-Butene
C4H8
0,294
1,435
2,503
CIS-2-Butene
C4H8
0,32
1,435
2,503
Trans-2-Butene
C4H8
0,291
1,435
2,503
Carbon Dioxide
CO2
0,74
1,255
1,977
Carbon Disulfide
CS2
0,638
1,65
3,393
Carbon Monoxide
CO
0,995
1
1,25
Carbon Tetrachloride
CCL4
0,344
2,345
6,86
Carbon Tetrafluoride (f-14)
CF4
0,44
1,77
3,926
Carbonyl Fluoride
COF2
0,567
1,555
2,045
Carbonyl Sulfide
COS
0,68
1,463
2,68
Chlorine
CL2
0,876
1,598
3,214
Chlorine Dioxide
CLO2
0,693
1,554
3,011
Chlorine Trifluoride
CLF3
0,433
1,812
4,125
Chlorodifluoromethane (f-22)
CHCLF2
0,505
1,77
3,906
Chloroform (Trichloromethane)
CHCL3
0,442
2,066
5,34
Chloropentafluoroethane (f-115)
C2CLF5
0,243
2,397
7,165
Chlorotrifluoroethylene
C2CLF3
0,337
2,044
5,208
Chlorotrifluoromethane (f-13)
CCLF3
0,43
1,985
4,912
2-Chlorobutane
C4H9CL
0,234
1,818
4,134
Cyanogen
(CN)2
0,498
1,366
2,322
Cyanogen Chloride
CLCN
0,618
1,48
2,73
Cyclobutane
C4H8
0,387
1,413
2,491
Cyclopropane
C3H6
0,505
1,224
1,877
Deuterium
D2
0,995
0,379
0,177
Diborane
B2H6
0,448
1
1,235
Diboromodifluoromethane (f-12B2)
CBr2F2
0,363
2,652
8,768
1,2-Dibromotetrafluoroethane (f-114B2)
C2Br2F4
0,215
2,905
10,53
Dichlorodifluoromethane (f-12)
CCL2F2
0,39
2,099
5,492
Dichlorofluoromethane (f-21)
CHCL2F
0,456
1,985
4,912
Dichlorosilane
SiH2CL2
0,442
1,897
4,506
Diedthylsilane
C4H12Si
0,183
1,775
3,94
2,2 Dichloro- 1,1,1- Trifloroethane
C2HCL2F3
0,259
2,336
6,829
1,2-Dichloroethane (Ethylene dichloride) C2H4CL2
0,382
1,879
4,419
1,2-Dichlorotetrafluoroethane (f-114)
C2CL2F4
0,231
2,449
7,479
1,1-Difluoro-1-Chloroethane
C2H3CLF2
0,341
1,957
4,776
1,1-Difluoroethane
CH3CHF2
0,415
1,536
2,94
1,1-Difluoroethylene
CH2:CF2
0,458
1,512
2,86
Difluoromethane (f-32)
CF2H2
0,627
1,36
2,411
Appendix A
Gas Conversion Table