Ocean Optics ElliCalc - Manual (Page 6)

Ocean Optics Germany GmbH Thin Film Metrology
5
1.3 Physical principle
The measurement principle of ElliCalc is the well-known fact of oblique reflection and interference of light
in thin layers. Light is reflected (and normally transmitted), resulting in different phase shifts and different
intensities for different wavelengths. Ellipsometry measures the change of phases and intensities between
vertically and horizontally oriented light and calculates different layer parameters like dispersion or
thickness.
After some calculations ElliCalc will show a result (here: 998 nm) nm as the best fit to the experimental
data (blue and magenta curves=measured signals, black curves = theoretical curves):
reflected intensity
70°
layer
substrate
transmitted (and
absorbed) intensity
70°