Ocean Optics ElliCalc User Manual
Page 2
Ocean Optics Germany GmbH Thin Film Metrology
1
CONTENTS
CONTENTS ....................................................................................................................................................................... 1
1 Introduction .................................................................................................................................................................... 3
1.1
Measurement setup ............................................................................................................................................. 4
1.2
Measurement signal ............................................................................................................................................ 4
1.3
Physical principle ................................................................................................................................................ 5
2
Installation .................................................................................................................................................................. 6
3
Product support ........................................................................................................................................................... 6
4
Getting started ............................................................................................................................................................. 7
5
User modes of ElliCalc ............................................................................................................................................... 9
5.1
SCOUT mode ..................................................................................................................................................... 9
5.2
Internal mode ...................................................................................................................................................... 9
5.3
Combiversion with NanoCalc ........................................................................................................................... 10
5.4
List of all menus and buttons ............................................................................................................................ 12
6
Basic features of ElliCalc ......................................................................................................................................... 13
6.1
Init ..................................................................................................................................................................... 13
6.2
Auto intensity .................................................................................................................................................... 13
6.3
Simulate ............................................................................................................................................................ 13
6.4
Measure............................................................................................................................................................. 14
6.5
Analyze ............................................................................................................................................................. 14
6.6
Continuous mode .............................................................................................................................................. 15
6.7
Fitness ............................................................................................................................................................... 15
7
Detailed features of ElliCalc .................................................................................................................................... 16
7.1
Main menu “File” ............................................................................................................................................. 16
7.1.1
Load layer recipe ...................................................................................................................................... 16
7.1.2
Import raw data ......................................................................................................................................... 17
7.1.3
Export raw data ......................................................................................................................................... 17
7.1.4
Print report ................................................................................................................................................ 18
7.1.5
Show all results ......................................................................................................................................... 18
7.1.6
Exit ............................................................................................................................................................ 18
7.1.7
Function keys ............................................................................................................................................ 18
7.2
Main menu “Screen” ......................................................................................................................................... 19
7.2.1
Spectrometer data ..................................................................................................................................... 19
7.2.2
Limits ........................................................................................................................................................ 21
7.2.3
Dispersion ................................................................................................................................................. 23
7.3
Main menu “Externals”..................................................................................................................................... 25
7.3.1
Mapping .................................................................................................................................................... 25
7.3.2
Result List ................................................................................................................................................. 31
7.3.3
Analyze mapped data ................................................................................................................................ 32
7.3.4
Structure of .map-file ................................................................................................................................ 32
7.3.5
Online/multipoint measurements .............................................................................................................. 32
7.3.6
Analyze online/multipoint data ................................................................................................................. 36
7.3.7
Structure of .onl-file .................................................................................................................................. 36
7.3.8
RS232 ....................................................................................................................................................... 36
7.3.9
Vision system ............................................................................................................................................ 37
7.4
Main menu “Options” ....................................................................................................................................... 38
7.4.1
Change buttons ......................................................................................................................................... 38
7.4.2
Fit parameters ........................................................................................................................................... 39
7.4.3
Some setups .............................................................................................................................................. 39
7.4.4
Operator mode .......................................................................................................................................... 40
7.4.5
Remote control .......................................................................................................................................... 41
7.5
Main menu “Version” ....................................................................................................................................... 42
7.6
Chart and chartdesigner .................................................................................................................................... 42
8
Special features for “SCOUT mode” ........................................................................................................................ 43
8.1
Main menu “File” ............................................................................................................................................. 43