Ocean Optics ElliCalc User Manual

Page 18

Ocean Optics Germany GmbH Thin Film Metrology

There is a section [Scout] in this layer recipe with an entry for "Scout_Recipename_EC". This entry is a link
to the corresponding SCOUT .sc2-recipe in the directory "c:\programs\scout\scout_sc2_recipes" (or similar
directory name).
If this linked .sc2-recipe is existent, SCOUT will be used for calculations = “SCOUT mode”. If this link is
empty, ElliCalc will calculate without SCOUT = “internal mode” (at the moment only for thicknesses and
Cauchy parameters!)

Example for SCOUT-mode (in ellipsometry):

Example for ElliCalc internal mode:

The *.lrc-file is an ASCII file that contains most parameters of the software, but NO measured or simulated
values of psi/delta (or tan(psi) /cos(delta)) as a function of the wavelength.
If you load a recipe you will not see any curve on the screen, but a change in the setup or the limits.

7.1.2

Import raw data

(internal mode and SCOUT mode)
You are asked for an import- directory. The imported values are displayed in blue (=similar to measured
values). The scale of the screen is not adjusted.

7.1.3

Export raw data

(internal mode and SCOUT mode)
If a curve was produced by simulation or measurement it may be exported as ASCC-file (“raw data”). This
file has a very simple structure: (lambda, tan(Psi), cos(Delta)
350,0.796,0.064
351,0.780,0.050
352,0.764,0.034
353,0.749,0.014
354,0.736,-0.009
355,0.722,-0.035
356,0.710,-0.064
357,0.697,-0.096
You are asked for a directory to save this file. Please use the default directory \RawData_Files\Ellipsometry

[Scout]
Scout_DirPath=c:\programs\scout
ScoutStopTime=15
Scout_RecipeName_NC=

Scout_RecipeName_EC=SiO2 (table) on Si.sc2

[Scout]
Scout_DirPath=c:\programs\scout
ScoutStopTime=15
Scout_RecipeName_NC=

Scout_RecipeName_EC=