Ocean Optics ElliCalc - Manual (Page 27)

Ocean Optics Germany GmbH Thin Film Metrology
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main menus of mapping mode
1. menu “Recipes”
• Save as map recipe
• Load map recipe
Here you may save or load ALL the settings you have done in all the various possibilities. It is
recommended to save your usual settings in a recipe. It is possible to use a special recipe name like
“myownRecipe”. Recipes for mapping will receive the extension “.mrc” and will be saved in menu
“Recipes\Map_Recipes”
2. menu “Teach in”
This will be explained later in the following section
3.menu “help”
this is the usual access to help functions
main buttons (lower right side)
init stage
you can initialize your ellipsometer (right mouse button=time adjustments possible)
auto intensity
you can adjust the nintegration times automatically (right mouse button=time adjustments possible)
measure
you can take a real (test) measurement with your sample. Thus you can control all settings before you
start the mapping
clear
clears the screen
conti
this will make a continuous mode for measurement
analyze
you can analyze the layer parameters your sample. Thus you can control all settings before you start
the mapping
initialize stage:
After starting mapping mode you have to initialize the xy-mapping stage first.
Until the xy-mapping stage is initialized the function start mapping is deactivated.
start mapping
this will start the mapping sequence
cancel
leave mapping mode
Scan mode:
a. shape of the wafers:
1. You may use square or round wafers.
2. To use your
own design as a background you need to edit the file
OwnDesign.bmp within the ElliCalc directory (this is possible with
lots of drawing programs, or ask your software supplier for help).
b. wafer size
Wafer size may be changed between 50 mm and 300 mm (= 8''). A
grid is shown with a constant grid distance (e.g. 10 mm).
c. scan region
It is possible to change:
- the x and y coordinates of the origin in steps of 0.1 mm
- the number of rows and the number of columns of the scanning
grid
(from 1 to 100)
- the size of the x and y steps (in multiples of 0.1 mm)
The wafer plot shows what you are doing.
d. rotation