Ocean Optics ElliCalc - Manual (Page 31)

Ocean Optics Germany GmbH Thin Film Metrology
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Teach in:
Teach in is an interactive tool to write new map-recipes without using text editors to edit the map recipe file.
Now the method with teach-in-mode:
1. Open the mapping window (main menu “map data”) and then the menu “TeachIn”
2. You will see this window:
3. To set the first marker position, click on “marker 1”, then move the measuring position
with the arrow keys on the keyboard
or by clicking somewhere in the wafer area
or by typing values in the text box
4. To set the second marker position, click on “marker 2”, then move the measuring position as before
5. To set the first data point, click on “data”, then move the measuring position as before
6. To set the next data point, click on the up down counter (now it should show the value 2 instead of 1)
and then move to the measuring position as before
7. Save the new recipe (like test.mrc) with the extension .mrc