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Ocean Optics ElliCalc User Manual

Page 26

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Ocean Optics Germany GmbH Thin Film Metrology

25

7.3

Main menu “Externals”

7.3.1

Mapping


You need a mapping-xy-stage and a special mapping
add-on software for ElliCalc to measure in mapping
mode. In this mode it is possible to measure and
display your film parameters as a function of x and y.