Ocean Optics ElliCalc - Manual (Page 33)

Ocean Optics Germany GmbH Thin Film Metrology
32
If you press “write data to EXCEL-file” EXCEL will be opened (if installed on your PC) and the data will be
transferred to a spreadsheet.
With “close all windows” you will return to NanoCalc main window and all mapping windows will be closed.
If you enter a value for “fitness limit” and press ENTER, the screen will be updated and all cells with a higher
fitness than your limit will be plotted in red (cells in grey show that this point was outside the wafer).
7.3.3 Analyze mapped data
This feature helps to analyze mapped data that have been measured earlier.
You are asked for a file name (extension .map) in directory ElliCalc\data\map_files. Then the results win-
dow is opened and you may inspect your data, plot the data or export them to Microsoft Excel.
7.3.4 Structure of .map-file
The first 2 lines are comments, the file format is very strict.
test4
user4
***
xy-ScanMode
1 Layer(s)
1 Layer(s)ToExtract
2 Row(s)
2 Col(s)
4 total points
5 xStep
5 yStep
***
IndexNo, row, col, x, y, fitness, d1
1, 1, 1, 30.000, 30.000, 0.048, 132.880717
2, 1, 2, 35.000, 30.000, 0.048, 132.806642
3, 2, 1, 35.000, 35.000, 0.048, 132.918102
4, 2, 2, 30.000, 35.000, 0.048, 132.858514
7.3.5 Online/multipoint measurements