Ocean Optics ElliCalc - Manual (Page 15)

Ocean Optics Germany GmbH Thin Film Metrology
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Hint:
If you want to have a short check which structure is simulated at the moment, put the mouse cursor over
the appropriate layer for some seconds and you see the layer thickness.
OR:
Leave your mouse cursor for some seconds over the button SIMULATE and look at the text in the status
bar.
6.4 Measure
This routine measures the ellipsometric spectra of your test device.
If you use a double spectrometer, you had to adjust the crossover wavelength. Below this wavelength the
data are collected from channel A ("master spectrometer"), above this wavelength they are collected from
channel B ("slave spectrometer").
6.5 Analyze
This routine analyzes a spectrum (either simulated or measured) within the data extraction limits.
• In SCOUT-mode: SCOUT is doing the calculations. The structure that is simulated may only be
changed within SCOUT.
• In ElliCalc’s internal mode: ElliCalc is doing the calculations (only thickness and Cauchy parameters at
the moment)
Hint:
To have a short check which structure is simulated at the moment, put the mouse cursor over the
appropriate layer for some seconds and you see the layer thickness.
OR:
Leave your mouse cursor for some seconds over the button SIMULATE and look at the text in the status
bar.