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Special features for “internal mode – Ocean Optics ElliCalc User Manual

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Ocean Optics Germany GmbH Thin Film Metrology

45

9

Special features for “internal mode”

This internal mode can only extract thicknesses in layer stacks, so this is much more restricted than
“SCOUT mode”. You do not need the SCOUT software and it may be faster than SCOUT in simple cases.

To reach this mode you have to use a lrc-recipe without an internal link to a SCOUT .sc2-recipe. There are
different possibilities to do do this:

Press SHIFT+CTRL+F12

Or: load a special .lrc-recipe, called “no_recipe.lrc”

Or: edit any .lrc-recipe manually: just remove the name of the .sc2-recipe after
“Scout_FileName_EC=name.sc2” in section [Scout]. Be careful with this manual editing, make a safety
copy! Finally the line should read: “Scout_FileName_EC=”


After this change, you will see a new button “EditStructure”, which allows you to edit your own layer stack.









9.1

EditStructure button

You will see this button and this window only if you do not use a SCOUT recipe = if you use ElliCalc’s
internal mode. You get good results, but only for the extraction of thicknesses (not dispersion)
In this menu “edit layer structure” you have to define your own layer structure