Ocean Optics ElliCalc - Manual (Page 36)

Ocean Optics Germany GmbH Thin Film Metrology
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c. option “number of runs”
You might want to run a certain number of
data points only or (nearly) infinitely.
Attention: “infinite” means about 999999
data points.
Result list for online/multipoint mode
On the first page you see the measured thickness values for each layer. In the picture above there 5
measured data points. In the last page you can see the associated fitness values for each measurement. In