INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 75)

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XTM/2 Operating Manual
3.8.5.4 Update Command
The format of the update command is:
U P F vvv.
Update parameter P of film F, with value vvv. A space is used as a delimiter
between the P and F values as well as the F and vvv values, where F is a digit
between 1 and 9;inclusive. Refer to
Table 4-2 on page 4-4 for a numbered list
of parameters and their limits.
or
U 6 F
Set the current film number to film F
See Query Command Parameter Definition Table for numbered list of
parameters.
NOTE: The command "U 99 F Tooling Final Thickness SPT Thickness Density
Z-ratio SPT Time" will update all parameters for film F. All parameter
values must be separated by spaces and must use allowed values per
those shown in the Parameter Definition Table.
3.8.5.5 Status Command
Sends back information based on specific request made.
The format of the status command is:
S xx . . . . Return the status (value) of xx
where:
S. . . . . . . Is the literal S
xx . . . . . . One or two digit code per list below:
S 0 . . . . . Rate, Thickness, Time, Xtal-Life
S 1 . . . . . Rate
S 2 . . . . . Thickness
S 3 . . . . . Time
S 4 . . . . . Film
S 5 . . . . . Crystal life (%)