8 operation, 9 mechanical, 2 transducer specifications (optional) – INFICON XTM/2 Thin Film Deposition Monitor User Manual
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XTM/2 Operating Manual
1.3.1.8 Operation
Power Requirements
"115 V" input range. . . . . . . . . . 90 to 132 V(ac), 49 to 61 Hz, 45 VA max.
fused at 3/8 Amp Type T fuse
"230 V" input range . . . . . . . . . 180 to 264 V(ac), 49 to 61 Hz, 45 VA max.
fused at 3/16 Amp Type T fuse
Operating Temperature . . . . . . . . . 0 to 50 °C (32 to 122 °F)
1.3.1.9 Mechanical
Size . . . . . . . . . . . . . . . . . . . . . . . . 3.5" H x 8" W x 12" D
(89 mm H x 203 mm W x 305 D mm)
Weight . . . . . . . . . . . . . . . . . . . . . . 6 lb. (2.7 kg)
1.3.2 Transducer Specifications (optional)
Max. Bakeout
Temperature*
Size (Max. Envelope)
Water Tube &
Coax Length
Body & Holder
IPN
Standard Sensor
130 °C
1.063" x 1.33" x .69" high
(27 mm dia. x 34 mm x 17.5 mm high)
30" (762 mm) 304 SS
750-211-G1
Standard Sensor
with Shutter
130 °C
1.06" x 2.24" x .69" high
(27 mm dia. x 57 mm x 17.5 mm high)
30" (762 mm) 304 SS
750-211-G2
Sputtering Sensor
105 °C
1.36" dia. x .47" high
(34.5 mm dia. x 11.8 mm high)
30" (762 mm) Au-plated BeCu
007-031
Compact Sensor
130 °C
1.11" x 1.06" x 1.06" high
(28 mm x 27 mm x 27 mm high)
30" (762 mm) 304 SS
750-213-G1
Compact Sensor
with Shutter
130 °C
2.08" x 1.62" x 1.83" high
(53 mm x 41 mm x 46 mm high)
30" (762 mm) 304 SS
750-213-G2
UHV Bakeable
Sensor
450 °C
1.35" x 1.38" x .94" high
(34 mm x 35 mm x 24 mm high)
12" (305 mm)
20" (508 mm)
30" (762 mm)
304 SS
007-219
007-220
007-221
UHV Bakeable
Sensor with Shutter
400 °C
1.46" x 1.37" x 1.21" high
(37 mm x 35 mm x 3.1 mm high)
12" (305 mm)
20" (508 mm)
30" (762 mm)
304 SS
750-012-G1
750-012-G2
750-012-G3
Shutter Assembly
400 °C
two models available
N/A
300-series SS
750-210-G1
750-005-G1
(Sputtering)
*For Bake only; waterflow is required for actual deposition monitoring. These temperatures are conservative maximum
device temperatures, limited by the properties of Teflon (PTFE) at higher temperatures. In usage, the water cooling allows
operation in environments that are significantly elevated, without deleterious affects.