INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 23)

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XTM/2 Operating Manual
1.3.1.4 Input/Output
Inputs . . . . . . . . . . . . . . . . . . . . . . 5 TTL inputs
Outputs . . . . . . . . . . . . . . . . . . . . . 4 SPST 2.5 amp relays rated
@ 30 V(dc) / 30 V(ac) / 42 V(peak) max.
Scan/Change Rate . . . . . . . . . . . . 4 Hz
1.3.1.5 Display
Type . . . . . . . . . . . . . . . . . . . . . . . 2x multiplexed custom LCD
Thickness Resolution* . . . . . . . . . 1 Å
Rate Resolution* . . . . . . . . . . . . . .1 Å for 1 to 99.9 Å/sec
1 Å for 100 to 999 Å/sec
* Other units appropriately scaled.
Enhanced resolution is achieved when
multiple measurement averaging is
employed.
Update Rate . . . . . . . . . . . . . . . . . 1 Hz
1.3.1.6 Process Variable Storage
Quantity . . . . . . . . . . . . . . . . . . . . 9 sets
Variables per set . . . . . . . . . . . . . . 6
1.3.1.7 Hardware Interface
Sensors . . . . . . . . . . . . . . . . . . . . 1, 15 pin D-Sub type
I/O
Standard (inputs/outputs) . . . . 5/4
Optional . . . . . . . . . . . . . . . . . None
Communications
Standard . . . . . . . . . . . . . . . . . RS232C, 9 Pin D-Sub type
Optional . . . . . . . . . . . . . . . . . IEEE-488
Chart Recorder . . . . . . . . . . . . . . . BNC