INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 42)

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XTM/2 Operating Manual
Table 2-1 Configuration Switch Settings
Switch 1 Test Mode (0 = off, 1 = on)
Switch 2 Parameter Lock (0 = off, 1 = on)
Switch 3 Beep On/Off (0 = on, 1 = off)
Switch 4 Close Shutter on
Crystal Fail (0 = yes, 1 = no)
Switch 5 Continue
Thickness/Timer
Accumulation Option (0 = off, 1 = on)
With Switch 5 in the On position, pressing the OPEN button adds to the
Thickness and Time counters and does not zero previously accumulated
Thickness or Time. Pressing CLOSE freezes the Thickness and Time
displayed at the current value. The displayed Rate will not be frozen. The Zero
function works normally and can be used to zero accumulated Thickness or
Time at any time.
Switch 6 Unused
Switch 7 Unused
Switch 8 Etch Mode (0 = off, 1 = on)
Switch 9 Displayed units MSB 00 = kÅ, 01 = µgm
Switch 10 Displayed units LSB 10 = mgm, 11 = MHz
Note: recorder function remains as Å/sec or Å in the
MHz setting.
Switch 11 Recorder function
MSB 00 = Rate, ±2000Å/sec, 1000ng/sec or 200µgm/sec
01 = Rate, ±200Å/sec, 100ng/sec or 20 µgm/sec
10 = Rate, ±20Å/sec, 10ng/sec or 2 µgm/sec
Switch 12 Recorder function
LSB 11 = Thickness, Modulus ±2000Å, 2000ng or 2000µgm
Switch 13 Recorder Output &
Display Averaging
MSB 00 = 1/4 sec
01 = 1 sec
Switch 14 Recorder Output &
Display Averaging
LSB 10 = 4 sec
11 = 16 sec
Note: Display average is always 1 second or greater.
Switch 15 Unused
Switch 16 Unused (Reserved)