INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 120)

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XTM/2 Operating Manual
6.4.4 Sputtering Sensor
Observe the general precautions ( section 6.4 on page 6-15 ) for replacing
crystals and follow the instructions below to replace the crystal in a sputtering
sensor.
1 Grip the body assembly with your fingers and pull it straight out to separate
it from the water-cooled front part. (You may have to disconnect the sensor
cable in order to separate the parts.) See
Figure 6-5 .
2 Pull the crystal holder straight out from the front of the sensor.
3 Remove the ceramic retainer from the crystal holder by pulling it straight out
with the crystal snatcher (see
section 6.4.5 on page 6-19 ).
4 Turn the crystal holder over so that the crystal drops out.
5 Install a new crystal into the crystal holder with the patterned electrode
facing the back and contacting the leaf springs on the ceramic retainer. (Use
only special crystals for sputtering, IPN 008-009-G10.)
6 Put the ceramic retainer back into the crystal holder and put the holder into
the front cover of the sensor.
7 Align the position of the back part so that the connector matches with the
notch on the front of the sensor. Snap the two parts together. Reconnect the
sensor cable if it has been disconnected.
Figure 6-5 Sputtering Crystal Sensor (Exploded)