6 operation as a deposition monitor, 1 monitoring - systems without a source shutter – INFICON XTM/2 Thin Film Deposition Monitor User Manual
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XTM/2 Operating Manual
2.6 Operation as a Deposition Monitor
Although this instrument is designed as a vacuum deposition/etch monitor, it is
also easily used for many other types of mass measurement applications. It is
easily installed by reviewing
for a schematic view of the
installation requirements and section
for an overview
of instrument function.
The following discussion is divided into four segments. The first is for
applications that do not require a source shutter. The second relates to those
that use a source shutter. The third section is a simple application of the
instrument for manual rate sampling. The fourth segment is directed towards
those applications that are nontraditional; including biological, electroplating,
etching and the measurement of liquid samples. The units may be programmed
in Å/KÅ or µgm/mgm/ngm depending on the setting of configuration switches 9
and 10, refer to
. If these switches are subsequently
changed, the two thickness parameter values of the active film are
appropriately recomputed.
2.6.1 Monitoring - Systems Without a Source Shutter
To operate the instrument as a film rate/thickness monitor only the following
three parameters need to be programmed. Press the PROG key to switch the
display in the program mode and enter the appropriate values. The values
entered for these parameters are independent of which units are chosen for
display (thickness or mass).
DENSITY . . . . . . . . . . . . . . . . . . . Depends on the material to be measured,
see
Appendix A, Table of Densities and
Z-RATIO . . . . . . . . . . . . . . . . . . . . Depends on the material to be measured,
see
Appendix A, Table of Densities and
TOOLING . . . . . . . . . . . . . . . . . . . Corrects for the geometrical differences
between the sensor and the substrate, see
Properly mount and attach the appropriate transducer (see
).
Press the PROG key to change the display between the program and operate
modes.
The Rate display group will indicate the evaporation rate and the Thickness
(mass) display group will increment accordingly. The front panel controls work
normally.