3 xiu (crystal interface unit) specifications, 4 guide to the use of the manual – INFICON XTM/2 Thin Film Deposition Monitor User Manual
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XTM/2 Operating Manual
1.3.3 XIU (Crystal Interface Unit) Specifications
The XTM/2 Series instruments use a new type of "passive intelligent" oscillator.
It is available with cable lengths of 15’ (4.572 m), 30’ (9.144 m), 50’ (15.24 m),
and 100’ (30.28 m) as IPN 757-305-G15, G30, G50, or G100, respectively.
Conventional, active style oscillators do not work with these instruments.
In-vacuum cable lengths to a maximum of 2 m (6.6’) are supported with this new
technology.
1.4 Guide to the Use of the Manual
This manual is configured to be used by both experienced and inexperienced
deposition process engineers. For those with significant experience, especially
on INFICON controllers, nearly all pertinent information is contained in
. Other sections contain the details that supplement the
information in the quick use section.
Every user should read the complete manual. It is strongly suggested that the
user or installer follow the following plan to gain the most information in the
shortest period of time.
Register the instrument to receive updates and important information from
the factory.
Read
section 1.1.1, Notes, Cautions, Warnings, on page 1-1
to understand
the safety related issues.
Read
, to become familiar with the instrument’s
needs and capabilities. Use the other sections of the manual to supplement
areas where you do not feel you have an adequate understanding of the
material. Throughout
there will be frequent references to the
manual sections that provide more detailed information. The final sections
of the
build the understanding of the full use of the instrument in
a logical progression, as suggested in
.
WARNING
There are no user serviceable components within the
instrument case.
Potentially lethal voltages are present when the line
cord or System I/O are connected.
Refer all maintenance to qualified personnel.