2 xtm/2 display description – INFICON XTM/2 Thin Film Deposition Monitor User Manual

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XTM/2 Operating Manual

2.4.2 XTM/2 Display Description

Figure 2-7 XTM/2 Display

1— RATE DISPLAY GROUP

Indicates the deposition or etching rate in the displayed units, or used to
display the tooling value when the display is in the Program mode. Also
used to briefly display %of Xtal life (based on 5 MHz = 100%) when xtal is
pressed and the display is in the operate mode. Displays the most
significant frequency information in the frequency monitor mode.

2— THICKNESS/MASS GROUP

Indicates the deposited or etched thickness (mass) in the displayed units.
Also used for briefly displaying the monitor crystal’s frequency when the
xtal key is pressed in the operate mode. This group is also used for
displaying density (gm/cc) when in the program mode. Displays the least
significant frequency information in the frequency monitor mode.

3— STATUS MESSAGE GROUP

When illuminated, indicates that the shutter is open and if the specified limit
was exceeded.

4— TEST MODE INDICATOR

When illuminated, indicates that the test mode configuration switch has
been set.

5— COMPUTER I/O OVERRIDE

Illuminates when control of one or more relays have been reconfigured
through computer communications.

6— ETCH MODE ON INDICATOR

When illuminated, indicates that the etch mode configuration switch has
been set. The thickness display now indicates the amount removed.

7— TIMER GROUP

Elapsed time indicator and unit annunciator. Displays the software version
number when XTAL key is pressed while display is in operate mode.