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4 specifications – INFICON XTM/2 Thin Film Deposition Monitor User Manual

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XTM/2 Operating Manual

6.5.4 Specifications

Dimensions

1.58 in. diameter x 1.79 in.
(40.13 mm diameter x 45.47 mm)

Temperature Range

0 to 50

o

C

Frequency

760-601-G1: 5.5 MHz ± 30 ppm at room temperature
760-601-G2: 5.5 MHz ± 1 ppm at room temperature

Materials

304 Stainless Steel, Nylon, Teflon, brass. Some internal components contain
zinc, tin, and lead.