INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 73)

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XTM/2 Operating Manual
3.8.4 Datalogging
Data logging may be configured to be automatic, see section 3.8.1 on page
3-16 . The RS232 port is then configured to output the DATALOG information
only and cannot receive commands from a host computer. The IEEE option, if
installed, will continue to work in the normal fashion.
The Datalog data output represents the information concerning the latest
SHUTTER OPEN to SHUTTER CLOSE sequence. The data is a series of ASCII
strings, each separated by a carriage return (CR) and line feed (LF), in the order
below:
1 Film #
2 Rate = _ _ _.__Å/s [or ngm/sec or µgm/sec] [Last good rate if crystal failed]
3 Thickness = _ _ _ _._ _ _ _ kÅ [or µgm or mgm] [Last good thickness if crystal failed]
4 Deposit Time = _ _:_ _ Min:Sec.
5 Begin Frequency = _ _ _ _ _ _ ._ Hz
6 End Frequency = _ _ _ _ _ _ ._ Hz [negative of last good frequency if crystal fail]
7 Crystal Life = _ _%
In addition to automatic datalogging, the datalog information string is available
via execution of the S12 communications command, or may be manually
initiated by pressing the CLOSE (shutter) key on the front panel.