INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 123)

6 - 21
IP
N 07
4-
18
6S
XTM/2 Operating Manual
6.5.1 Diagnostic Procedures
The following diagnostic procedures employ the Crystal Sensor Emulator to
analyze a constant Crystal Fail message. The symptom is a Crystal Fail
message that is displayed by the Deposition Controller even after the monitor
crystal has been replaced with a new “good” monitor crystal.
NOTE: The "Unable To Auto Z" message will be displayed if the Crystal Sensor
Emulator is attached to a deposition controller and you are attempting
to use the Auto Z feature. This is to be expected and is normal.
6.5.1.1 Measurement System Diagnostic Procedure
1 Refer to Figure 6-8 on page 6-20 . Remove the six-inch BNC cable from the
Feed-Through at point A.
2 Connect the Crystal Sensor Emulator to the 6 inch BNC cable at Point A.
Š If the XTAL Fail message disappears after approximately five seconds,
the measurement system is working properly. Re-install the six-inch
BNC cable to the Feed-Through. Go to
section 6.5.1.2 .
Š If the XTAL Fail message remains, continue at step 3.
3 Disconnect the six-inch BNC cable from the Oscillator and from the
Emulator.
4 Visually inspect the six-inch BNC cable to verify that the center pins are
seated properly.
5 Use an Ohm meter to verify the electrical connections on the six-inch BNC
cable.
Š There must be continuity (<0.2 ohms) between the center pins.
Š There must be isolation (>10 megohms) between the center pins and
the connector shield.
Š There must be continuity between the connector shields.
Replace the six-inch BNC cable if it is found to be defective and repeat Step
2 of this procedure.
6 If the six-inch BNC cable is not defective, re-connect the six-inch cable to
the oscillator and to the Crystal Sensor Emulator. If the XTAL Fail message
remains, contact INFICON's Service Department.