INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 44)

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XTM/2 Operating Manual
2.5.4 System I/O
A 25-pin male "D" type connector for interface connection. (See section 3.7 on
page 3-14 for details.) The outputs are normally open type relays.
Figure 2-12 25-Pin Male "D" Connector
Pin # Function*
Outputs
1,2 Source Shutter
3,4 Thickness Setpoint
5,6 Timer Setpoint
7,8 Sensor Fail
Inputs
9 Crystal Fail Inhibit
14,15,16,17 INPUT Common (GND)
18 OPEN shutter
19 CLOSE shutter
20 Zero thickness
21 Zero timer
*The function of the relay outputs may be altered to
be controlled remotely through the computer
communications, see
section 3.8.5.6 on page 3-26
for more information on the Remote Command.