INFICON XTM/2 Thin Film Deposition Monitor - Manual (Page 122)

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XTM/2 Operating Manual
6.5 Crystal Sensor Emulator
IPN 760-601-G1 or 760-601-G2
NOTE: 760-601-G1 (obsolete) is not compatible for use with an IC/5 and IC/4.
760-601-G2 is fully compatible with all thin film deposition controllers.
The Crystal Sensor Emulator option is used in conjunction with the Thin Film
Deposition Controller to rapidly diagnose problems with the Deposition
Controller's measurement system. See
Figure 6-7 .
Figure 6-7 Crystal Sensor Emulator
The Crystal Sensor Emulator may be attached at various points in the
measurement system, from the oscillator to the sensor head. It provides a
known "good" monitor crystal with known "good" electrical connections. Using
the emulator and the controller in a systematic manner provides a fast means
of isolating measurement system, cable, or sensor problems. See
Figure 6-8 .
Figure 6-8 Crystal Sensor Emulator Attachment Points
CAUTION
This product is designed as a diagnostic tool, and is
not intended for use in vacuum. Do not leave the
Crystal Sensor Emulator installed in the vacuum
system during processing.
Female
BNC
Connector
Female
Microdot
Connector
Sensor
Cover
Connector
Thin Film
Controller
Crystal Interface
Unit (Oscillator)
Sensor Head
A
B
C