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Validity trademark – INFICON SKY CDGxxxD (Profibus) User Manual

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tira54e1-a (2009-01) CDGxxxD.cp

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This document applies to products of the CDG045D, CDG100D, CDG160D and
CDG200D series with Profibus interface.

Part numbers of standard products are indicated below. OEM products have other
part numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.

3

⇒ 0.1

4

⇒ 0.25

5

⇒ 0.5

6

⇒ 1

7

⇒ 2

8

⇒ 5

9

⇒ 10

A

⇒ 20

B

⇒ 50

C

⇒ 100

D

⇒ 200

E

⇒ 500

F

⇒ 1000 (Torr only)

G

⇒ 1100 (mbar only)

3Cx1-xxx-2320

5

⇒ Torr

(x 133 Pa; x 1.3 mbar)

6

⇒ mbar

(x 100 Pa)

1

⇒ DN 16 ISO-KF

3

⇒ DN 16 CF-R

9

⇒ 1/2" tube

E

⇒ 8VCR female

C

⇒ 45°

D

⇒ 100°

E

⇒ 160°

F

⇒ 200°°

Measurement range

(F.S.)

Unit

Sensor temperature

Flange

The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document
correspond to CDG045D gauges with the DN 16 ISO-KF vacuum connection. They
apply to other vacuum connections and to the other gauges by analogy.

We reserve the right to make technical changes without prior notice.

SEMI

®

Semiconductor Equipment and Materials International, California


Validity

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