INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 89)

Appendix
B. Specifications
Measurement
Number of Sensors
Frequency Range
Frequency Accuracy
Frequency Resolution
Rate Accuracy
Rate Display Resolution
Thickness Accuracy
Thickness Resolution
Measurement Period 2 (+2 optional)
4.0 MHz to 6.0 MHz
.001%
.03 Hz @ 10 readings/sec
.5% typical
.01 or .1 A/s
.5% typical
.001 kA
.1 to 1 sec.
Source
Number of Sources
Control Voltage
Resolution 2 (+2 optional)
0 to ±10V into 2k
load
15 bits
Digital I/ O
Digital Inputs
Functions
Input Rating
Relay Outputs
Functions
Relay Rating
8 (+8 optional)
User Selected (See Chapter 3)
5VDC, non-isolated
8 (+8 optional)
User Selected (See Chapter 3)
30Vrms or 30VDC, 2A maximum
General Specifications
Mains Power Supply
Power Consumption
Operating & Transportation
Environment
Storage Environment
Rack Dimensions (HxWxD)
Weight
100-120/200-240~, ±10% nominal
50/60 Hz, auto detect
25W
0
C to 50C
0 to 80% RH non-condensing
0 to 2,000 meters
Indoor Use Only
Class 1 Equipment (Grounded Type)
Suitable for Continuous Operation
Ordinary Protection (not protected
against harmful ingress of moisture)
Pollution Degree II
Installation (Overvoltage) Category II
for transient overvoltages
-40
C to 70C
5.23 in. x 8.4 in. x 10.0 in.
132.8mm x 213.4mm x 254.0mm
4 pounds (1.8 kg)