INFICON SQC-310 Thin Film Deposition Controller - Manual (Page 86)

Appendix
Formula Density Z-Ratio Material Name
Ni 8910 0.331 Nickel
NiCr 8.500 *1.000 Nichrome
NiCrFe 8.500 *10~ Inconel
NiFe 8.700 *1.000 Permalloy
NiFeMo 8.900 *10~ Supermalloy
NiO 7.450 *1.000 Nickel Oxide
P
3
N
5
2.510 *1.000 Phosphorus Nitride
Pb 11.300 1.130 Lead
PbCl
2
5.850 *1.000 Lead Chloride
PbF
2
8.240 0.661 Lead Fluoride
PbO 9.530 *1.000 Lead Oxide
PbS 7.500 0.566 Lead Sulfide
PbSe 8.100 *1.000 Lead Selenide
PbSnO
3
8.100 *1.000 Lead Stannate
PbTe 8.160 0.651 Lead Telluride
Pd 12.038 0.357 Palladium
PdO 8.310 *1.000 Palladium Oxide
Po 9.400 *1.000 Polonium
Pr 6.780 *1.000 Praseodymium
Pr
2
O
3
6.880 *1.000 Praseodymium Oxide
Pt 21.400 0.245 Platinum
PtO
2
10.200 *1.000 Platinum Oxide
Ra 5.000 *1.000 Radium
Rb 1.530 2.540 Rubidium
Rbl 3.550 *1.000 Rubidium Iodide
Re 21.040 0.150 Rhenium
Rh 12.410 0.210 Rhodium
Ru 12.362 0.182 Ruthenium
S8 2.070 2.290 Sulphur
Sb 6.620 0.768 Antimony
Sb
2
O
3
5.200 *1.000 Antimony Trioxide
Sb
2
S
3
4.640 *1.000 Antimony Trisulfide
Sc 3.000 0.910 Scandium
Sc
2
O
3
3.860 *1.000 Scandium Oxide
Se 4.810 0.864 Selenium
Si 2.320 0.712 Silicon
Si
3
N
4
3.440 *1000 Silicon Nitride
SiC 3.220 *1.000 Silicon Carbide
SiO 2.130 0.870 Silicon (II) Oxide
SiO
2
2.648 1.000 Silicon Dioxide